Oxides of nitrogen (NOX) emissions are a known precursor to formation of ozone and acid rain and can react with volatile organic compounds to form photo-chemical smog. The increasing requirements for reduction on NOX emissions from combustion furnaces require the development of a control strategy to identify the most effective approach for each installation. The aim of ozone processing is oxidation of NO to NO2 and then to N2O5. NO is the main component of NOx in most practical exhaust gases. Unlike NO having low solubility, NO2 andN2O5 are highly soluble in water. Thus, if NO is converted into NO2 and N2O5, it can be further treated by a wet method. Ozone rapidly reacts with insoluble NO to form soluble N2O5.The species N2O5 rapidly reacts with moisture in the gas stream to form nitric acid. The conversion of NOx into the aqueous phase in the scrubber allows removal of NOx up to 95%.